Roots vacuum pumps
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Новинка
Авторы:
Бурмистров Алексей Васильевич, Райков Алексей Александрович, Саликеев Сергей Иванович, Исаев Александр Анатольевич
Год издания: 2023
Кол-во страниц: 84
Дополнительно
Вид издания:
Учебное пособие
Уровень образования:
ВО - Магистратура
ISBN: 978-5-7882-3339-0
Артикул: 843909.01.99
The tutorial highlights the operating principle, structural modifications, general and individual solutions applied for Roots vacuum pumps, as well as advantages and disadvantages of the latter. Pumping characteristics of the pumps and units by major producers of Roots machines are provided. It is intended for use by bachelors degree students of the course 15.04.02 "Technological machines and equipment”, specialization "Vacuum and compressor equipent of physical machines”, and masters degree students of the curricula "Designing and operation of vacuum processing equipment” and "Vacuum engineering and technology”. The book will be useful for professors, Ph.D. fellows and students engaged in the training programs "Technological machines and equipment”, "Applied physics”, "Nuclear engineering and thermal physics”, "Nanoengineering”. The tutorial is prepared at the Department of "Vacuum and compressor equipment of physical machines”.
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The Ministry of Science and Higher Education of the Russian Federation Kazan National Research Technological University ROOTS VACUUM PUMPS Tutorial Kazan KNRTU Press 2023
621.521(075) Published by the decision of the Editorial Review Board of the Kazan National Research Technological University Reviewers: PhD in Physics and Mathematics P. Osipov PhD in Technical Sciences K. Moiseev Burmistrov A. Roots vacuum pumps : tutorial / A. Burmistrov, A. Raykov, S. Salikeev, A. Isaev; The Ministry of Education and Science of the Russian Federation, Kazan National Research Technological University. – Kazan : KNRTU Press, 2023. – 84 p. ISBN 978-5-7882-3339-0 The tutorial highlights the operating principle, structural modifications, general and individual solutions applied for Roots vacuum pumps, as well as advantages and disadvantages of the latter. Pumping characteristics of the pumps and units by major producers of Roots machines are provided. It is intended for use by bachelor`s degree students of the course 15.04.02 “Technological machines and equipment”, specialization “Vacuum and compressor equipment of physical machines”, and master`s degree students of the curricula “Designing and operation of vacuum processing equipment” and “Vacuum engineering and technology”. The book will be useful for professors, Ph.D. fellows and students engaged in the training programs “Technological machines and equipment”, “Applied physics”, “Nuclear engineering and thermal physics”, “Nanoengineering”. The tutorial is prepared at the Department of “Vacuum and compressor equipment of physical machines”. 621.521(075) ISBN 978-5-7882-3339-0 © A. Burmistrov, А. Raykov, S. Salikeev, A. Isaev, 2023 © Kazan National Research Technological University, 2023 2
C O N T E N T Explanation of symbols and terms ....................................................................................................... 4 Introduction .......................................................................................................................................... 5 1. HISTORICAL NOTE ...................................................................................................................... 7 2. ADVANTAGES AND DISADVANTAGES OF ROOTS VACUUM PUMPS ........................... 11 3. OPERATING PRINCIPLE OF ROOTS VACUUM PUMPS. OPERATION WITHIN THE UNIT ......................................................................................................................................... 13 4. ROOTS VACUUM PUMPS OF NVD SERIES BY VAKUUMMASH ...................................... 24 5. BASIC CIRCUITS OF ROOTS VACUUM PUMP WORKING MECHANISMS, AND GENERAL STRUCTURAL SOLUTIONS ...................................................................................... 31 6. INDIVIDUAL STRUCTURAL AND TECHNOLOGICAL SOLUTIONS OF ROOTS VACUUM PUMPS ............................................................................................................................ 38 7. MULTI-STAGE ROOTS VACUUM PUMPS .............................................................................. 71 8. SPECIFIC CHARACTERISTICS OF ROOTS VACUUM PUMPS ............................................ 74 9. TESTING OF ROOTS VACUUM PUMPS .................................................................................. 76 Conclusion ......................................................................................................................................... 81 Literature ............................................................................................................................................ 83 3
E x p l a n a t i o n o f s y m b o l s a n d t e r m s NVD (DVN) – Roots vacuum pump VP – vacuum pump SVP – scroll vacuum pump CVP – claw vacuum pump RVP – rotary vane pump RPVP – rotary plunger vacuum pump 4
I N T R O D U C T I O N This tutorial continues a set of works studying non-contact oil-free vacuum pumps written by vacuum engineers of Kazan. It would not be an exaggeration to say that in the XXI century, Kazan with allocated therein Vakuummash being a major plant of vacuum technology, and specialist Department of “Vacuum and compressor equipment of physical machines” at the Kazan National Research Technological University has become a center of oil-free vacuum in Russia. It stands to mention that some years ago, Russia did not produce oilfree pumps serially. The production was reduced to two “small” Roots vacuum pumps – NVD-200 and NVD-600 manufactured by Vakuummash (Kazan), and singular test specimens of CVP and Roots vacuum pumps. All demand for oil-free vacuum was provided by foreign equipment. But in 2016, Vakuummash, in collaboration with KNRTU Department of “Vacuum and compressor equipment of physical machines”, began the production of “dry” scroll vacuum pumps. There appeared a range of scroll vacuum pumps (SVP) with pumping speed of 4, 12, 35 m3/h. Since 2019, the series was extended by “large” SVP with pumping speed of 60 m3/h. Currently, series of Roots vacuum pumps and screw vacuum pumps are de-signed and exposed to staging. Since 2023, Roots vacuum pumps with pumping speed from 1000 to 2100 m3/h and screw vacuum pumps with pumping speed of 630 m3/h will be put to serial production. Therefore, Russia will soon produce practically all types of mechanical oil-free pumps, except for claw vacuum pumps. For designing and operating such super-complex non-contact oil-free machines, as well as building up hi-tech production, there are required highqualified personnel having a good understanding of structural features of any construction and being familiar with a variety of engineering solutions. This is exactly the goal of the present set of tutorials. By content, the tutorial is intended for a wide readership. Primarily, for bachelor`s degree students of the course 15.03.02 “Technological machines and equipment” and master`s degree students of the curricula 15.04.02 “Designing and operation of vacuum processing equipment” and “Vacuum engineering and technology”, as well as engineers of vacuum technology. However, this material might be useful for constructors, technologists, designers and maintenance engineers working on industrial and laboratory pumping equipment. 5
The tutorial provides operating principle, advantages and disadvantages of Roots vacuum pumps, basic diagrams of working gears, general and individual structural concepts, specific characteristics of Roots vacuum pumps and units by the world`s major manufacturers. The book generalizes experience gained by the project performers in progress. Writing staff is represented by KNRTU Department of “Vacuum and compressor equipment of physical machines”: A. Burmistrov – Doctor in Technical Sciences, Professor; S. Salikeev – Ph.D. in Technical Sciences, Associate professor; A. Raykov – Ph.D. in Technical Sciences, Associate professor, and A. Isaev – Ph.D. student at KNRTU and the head of the mechanical vacuum pumps section of Vakuummash. The authors are grateful to their colleagues for instructive discussion, provision of separate materials and help of various kinds when editing the manuscript. Readers` criticism and suggestions are welcome and will be accepted with thanks. 6
. H I S T O R I C A L N O T E Roots vacuum pump is a mechanical rotary vacuum pump of external compression, its working chamber being formed by the casing and profile straight-toothed rotors rotating in synchronism, in opposite directions with minimum clearances. Roots vacuum pump is also called a booster vacuum pump. Most papers on Roots-type pumps classify them as volume displacement machines. This makes sense because pumping is realized on account of rotors` transport of cut-off volumes. However, one should not be surprised that a Roots vacuum pump is classified as a volume displacement-velocity pumping facility, since along with direct rotors` transfer of cut-off volumes, backflow takes place via slot channels from outlet to inlet. Since channel walls are movable, the process therein is similar to the one in high-speed (kinetic) pumps. Hence, the most appropriate definition of a Roots vacuum pump allowing to construct sufficient mathematical model of pumping process is as follows: Roots vacuum pump is a non-contact volume displacement-velocity pumping machine, the operating process therein including direct volume pumping (due to rotors` gas transfer in cut-off volumes from inlet to outlet) and velocity gas backflow via channels of rotary mechanism (from outlet to inlet). Like many other machines, Roots vacuum pump came to vacuum technology from compressor sector where it was used as a rotary blower. A Roots blower got its name after American inventors – brothers Philander and Francis Marion Roots who founded the Roots Blower Company in Connersville, Indiana, USA. In 1860, the brothers patented principal design of the external compression blower intended for operation in blast furnaces and other production sectors. In 1869, they took out a patent from UK Patent office acknowledging the invention of “improved rotary blower machines”. In 1875, the blower was shown at the exhibition in St. Petersburg. Initially, the main advantage of a Roots blower was its high performance. But in the middle of XX century, vacuum engineers also appreciated the absence of oil in the machine working volumes. This privilege considered to be precious at the time of development of semiconductor technologies and overall directions applying thin films, as well as food and medical technologies. 7
Figure 1.1. Inventors of the first Roots-type machine – Philander and Francis Marion Roots For most high-vacuum technology equipment, e.g. production lines of microcircuits and surface analysis instruments, oil vapour flow to the pumped volume is utterly intolerable. Thereby, backflow increases sharply when the pump input pressure turns lower than 1–10 Pa. Under such pressures, in pipelines there establishes collision-free flow mode, and oil vapour molecules flow toward the pumped gas stream without hindrance. Backflow measurement in a mechanical oil-sealed pump gives about 0.5 mg/h to 1 cm2 of cross-sectional area of inlet nozzle. This corresponds to occurring every second an oil film monolayer formed on the surface in the vicinity of inlet nozzle. In most cases, this situation naturally causes irreplaceable outcome for technology process and is intolerable, therefore. To form low, medium and high vacuum, producers of oil-sealed vacuum pumps offer to install various traps intended for preventing oil flow to the pumped volume, but this solution significantly decreases pumping speed, moreover, it does not totally protect the vacuum volume from working fluid vapour. It is notable how installation of a Roots pump influences oil vapour backflow. As seen from Fig. 1.2, rotation of Roots pump rotors makes up 8
a dynamic “trap” for vapours, and backflow even without traps decreases several-fold. However, oil-sealed vacuum pumps equipped with such a trap fail to prevent oil vapour leak completely. This was the reason to construct mechanical oil-free (“dry”) pumping machines of low and medium vacuum. Main requirement for a “dry” forevacuum pump is provision of ultimate pressure not exceeding 1 Pa. In this case, a Roots vacuum pump is a fair substitution of an oil-sealed vacuum pump. The requirement is satisfied in the following “dry” vacuum pumps: scroll, screw, multistage claw and multistage Roots vacuum pumps. Figure 1.2. Density of backflow and rate of oil film formation in the input nozzle zone for rough pumping system of various structures: 1 – mechanical pump; 2 – Roots vacuum pump – mechanical pump; 3 – mechanical pump with a trap; 4 – unit “trap – Roots vacuum pump – mechanical pump” But for technologies requiring great pumping speed at medium vacuum, Roots vacuum pumps are irreplaceable. Their pumping speed is up to 40000 m3/h and they can be combined with both oil-sealed pumps and “dry” pumps. In combination with “dry” pumping means, one can obtain an oil-free unit characterized by high pumping speed and low ultimate pressure. Roots vacuum pumps are well integrated to modern high-duty vacuum system, thus, these pumps are manufactured by all major producers 9